Multi-volume edition: Proceedings of SPIE. 27th International Symposium on Atmospheric and Ocean Optics, Atmospheric Physics (15 December 2021)
Том: 11916
, Уear of publication: 2021
Abstract
We propose the operating principle of a nanophotonic highly sensitive microsensor for a wide range of applications in technology, electronics, medicine as a sensor of pressure, temperature, vibration, blood pressure, etc. Computer simulation of the visible radiation interaction with the sensor nanostructure was carried out using the author's software product. The software is based on the modern mathematical apparatus of the vector finite element method.
